Introduction to Auger Spectroscopy

Auger Electron Spectroscopy (AES) is a complementary technique to X-ray Photoelectron Spectroscopy (XPS). In both analysis techniques, elemental and chemical surface information from the top ~7nm of a material are provided. AES is generally used for the analysis of conductive and semiconducting samples, particularly when higher spatial resolution is required over what is achievable by XPS. In this talk, we will go over briefly the theory of the technique. Then we will go over specific applications that discuss the advantages as well as the challenges in AES analysis.